Bulk Silicate Glass - Wet Etching

Bulk Silicate Glass - Wet Etching

Material Name: Bulk silicate glass
Recipe No.: 10314
Primary Chemical Element in Material: Si
Sample Type: Bulk
Uses: Etching
Etchant Name: None
Etching Method: Wet etching
Etchant (Electrolyte) Composition: See the Table 1.
Procedure (Condition): No data
Note: No data
Reference: Todd G McKenzie, Thin Film Resistance to Hydrofluoric Acid Etch with Applications in Monolithic Microelectronic/MEMS Integration, MSc Thesis, School of Electrical and Computer Engineering, Georgia Institute of Technology, 2003, p. 13.

Table 1: Bulk silicate glass etch rates at 25 C (µm/min).