Molten Flux and Other Wet Etchants for SiC

Molten Flux and Other Wet Etchants for SiC

Material Name: SiC
Recipe No.: 10348
Primary Chemical Element in Material: Si
Sample Type: Layer
Uses: Etching
Etchant Name: None
Etching Method: Wet etching
Etchant (Electrolyte) Composition: See the Table 1.
Procedure (Condition): No data
Note: No data
Reference: S.J. Pearton, et al., Wet Chemical Etching of Wide Bandgap Semiconductors-GaN, ZnO and SiC, ECS Transactions, 6 (2) 501-512 (2007).

Table 1: Molten flux and other wet etchants for SiC.