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BF3 Etchant - Si Single Crystal Spheres - Wet Etching

Material Name: Si single crystal spheres
Recipe No.: 1950
Primary Chemical Element in Material: Si
Sample Type: Single crystal
Uses: Etching
Etchant Name: BF3 etchant
Etching Method: Chemical etching
Etchant (Electrolyte) Composition: 11 g NH4 x HF, 25 ml HNO3, 2 ml H2O (BF3 etch).
Procedure (Condition): Temperature: RT.
Note: Si single crystal spheres and cut forms. Finite crystal form of sphere was a cube (100).
Reference: Perrin Walker, William H Tarn: Handbook of Metal Etchants, CRC Press, Boca Raton, Florida, USA, 1990, p. 1074.