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KOH:K3Fe(CN)6 - GaAs - Wet Etchant by Chemical Composition

Material Name: GaAs
Recipe No.: 5939
Primary Chemical Element in Material: Ga
Sample Type: Wafer
Uses: Etching
Etchant Name: None
Etching Method: Wet etching
Etchant (Electrolyte) Composition: KOH:K3Fe(CN)6 [(120 g KOH + 500 ml H2O):(80 g K3Fe(CN)6 + 500 ml H2O)]
Procedure (Condition): No data
Note: Wet etchant by chemical composition. GaAs layer delineation; Ref. (Colliver, D.J., 1976).
Reference: A.R. Clawson, Guide to references on III-V semiconductor chemical etching, Materials Science and Engineering (Original Reference List), 31 (2001), p. 233.