KOH:K3Fe(CN)6 - GaAlAs/GaAs - Wet Etchant by Chemical Composition

Material Name: GaAlAs/GaAs
Recipe No.: 5940
Primary Chemical Element in Material: Ga
Sample Type: Wafer
Uses: Etching
Etchant Name: None
Etching Method: Wet etching
Etchant (Electrolyte) Composition: K3Fe(CN)6:KOH:H2O (8 wt.%:12 wt.%:100 wt.%)
Procedure (Condition): No data
Note: Wet etchant by chemical composition. AlGaAs/GaAs layer delineation; Ref. (Zhu, Y., 1991).
Reference: A.R. Clawson, Guide to references on III-V semiconductor chemical etching, Materials Science and Engineering (Original Reference List), 31 (2001), p. 233.

















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