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Etchants for Insulators and Conductors - Wet Etching

Material Name: SiO2, Si3N4, Al, Au, Mo, Pt, W
Recipe No.: 8504
Primary Chemical Element in Material: Si, Al, Au, Mo, Pt, W
Sample Type: Thin film
Uses: Etching
Etchant Name: None
Etching Method: Wet etching
Etchant (Electrolyte) Composition: See the Table 1.
Procedure (Condition): No data
Note: No data
Reference: CHAPTER 6: Etching, http://www.cityu.edu.hk/phy/appkchu/AP6120/6.PDF, 2020.

Table 1: Etchants for insulators and conductors.