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LiNbO3, LN - Dry Etching

Material Name: Lithium niobate (LiNbO3, LN)
Recipe No.: 8513
Primary Chemical Element in Material: Li
Sample Type: Thin film, bulk
Uses: Etching
Etchant Name: None
Etching Method: Dry etching
Etchant (Electrolyte) Composition: See the Table 1.
Procedure (Condition): No data
Note: No data
Reference: H. Hu, et al., Plasma etching of proton-exchanged lithium niobate, J. Vac. Sci. Technol. A 24„4…, Jul/Aug 2006 pp. 1012-1015.

Table 1: Dry etching parameters, etching rate, and average selectivity.