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Defects in Transistors Revealed by Etching
Material Name: Silicon
Record No.: 30
Primary Chemical Element in Material: Si
Sample Type: Wafer
Uses: Etching
Etchant Name: None
Etching Method: No data
Etchant (Electrolyte) Composition: No data
Procedure (Condition): No data
Note: Stacking faults revealed by the so-called "Secco etch" for 30 seconds in transistors. For one kind of process we can
see different phases of the stacking fault generation by process-induced "forces" by looking at wafers from different
stages of the process.
Reference: Website https://www.tf.uni-kiel.de/matwis/amat/elmat_en/index.html, 2020.
Figure 1: Here we see bipolar transistors where just the collector contact (the oval part) and the base region (the rectangular
part) have been defined.