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Categories of Different Types of Scratches

Material Name: No data
Record No.: 49
Primary Chemical Element in Material: No data
Sample Type: Wafer
Uses: Polishing
Etchant Name: None
Etching Method: Polishing
Etchant (Electrolyte) Composition: No data
Procedure (Condition): No data
Note: Figure 1 shows the various types of scratches that were observed as a result of addition of rogue particles. These scratches were classified into three basic categories: (1) plastic scratches that show no brittle fracture, (2) brittle scratches, which only have cracks (trailing indent or lateral) and (3) mixed scratches that contain both plastic modification and cracks.
Reference: Tae-Young KWON, Manivannan RAMACHANDRAN, Jin-Goo PARK, Scratch formation and its mechanism in chemical mechanical planarization (CMP), Friction 1(4): 279–305 (2013).


Figure 1: Categories of different types of scratches observed in fused silica sample.