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Spin Defect – Line

Material Name: Wafer
Record No.: 65
Primary Chemical Element in Material: No data
Sample Type: Wafer
Uses: Etching
Etchant Name: None
Etching Method: Etching
Etchant (Electrolyte) Composition: No data
Procedure (Condition): No data
Note: No data
Reference: Website https://www.microtronic.com/defect-library/reticle-tilt-defect/, Image and text by courtesy of Microtronic company, 2020.


Figure 1: EAExample of single line spin macro defect detected by EAGLEview. This macro defect is sometimes referred to as a comet because it may be induced by a particle that causes the resist to flow around the defect during the spin operation.


Figure 2: Single Line Spin Macro Defect Detected by Microtronic EAGLEview.