Particle Defects

Particle Defects

Material Name: Wafer
Record No.: 76
Primary Chemical Element in Material: No data
Sample Type: Wafer
Uses: Etching
Etchant Name: None
Etching Method: Etching
Etchant (Electrolyte) Composition: No data
Procedure (Condition): No data
Note: No data
Reference: Website https://www.microtronic.com/defect-library/particle-defects/, Image and text by courtesy of Microtronic company, 2020.

Figure 1: Example of a macro defect identified by EAGLEview auto macro defect inspection system that was caused by a particle.

Figure 2: Additional example of semiconductor wafer image showing a particle macro defect detected by EAGLEview during an inspection run.