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Lens Stepper Macro Defects

Material Name: Wafer
Record No.: 78
Primary Chemical Element in Material: No data
Sample Type: Wafer
Uses: Etching
Etchant Name: None
Etching Method: Etching
Etchant (Electrolyte) Composition: No data
Procedure (Condition): No data
Note: No data
Reference: Website https://www.microtronic.com/defect-library/lens-stepper-macro-defects/, Image and text by courtesy of Microtronic company, 2020.


Figure 1: A lens stepper macro defect may look similar to a reticle tilt caused macro defect. Lens stepper caused macro defects on the wafer typically shows a difference within the stepper shot (center of the lens field is different than the edge of the lens field) while the reticle tilt caused macro defect goes across a stepper shot. The lens stepper macro defect can be due to a variety of problems; dirty lens, malfunctioning i-line filter, an incorrect reticle throughout rate in the stepper job or other causes.


Figure 2: This is another example of a lens stepper macro defect taken by EAGLEview.