Wafer Hotspot Defects

Wafer Hotspot Defects

Material Name: Wafer
Record No.: 79
Primary Chemical Element in Material: No data
Sample Type: Wafer
Uses: Etching
Etchant Name: None
Etching Method: Etching
Etchant (Electrolyte) Composition: No data
Procedure (Condition): No data
Note: No data
Reference: Website https://www.microtronic.com/defect-library/wafer-hotspot-defects/, Image and text by courtesy of Microtronic company, 2020.

Figure 1: A hotspot macro defect is a localized area that is out of focus and may be due to a particle on the backside of the wafer or a particle on the stepper chuck.

Figure 2: Image of a hotspot macro defect identified by an EAGLEview inspection.

Figure 3: Another representative example of a large hotspot identified and imaged during an EAGLEview automated defect inspection.