Wafer Contamination

Wafer Contamination – Small

Material Name: Wafer
Record No.: 85
Primary Chemical Element in Material: No data
Sample Type: Wafer
Uses: Etching
Etchant Name: None
Etching Method: Etching
Etchant (Electrolyte) Composition: No data
Procedure (Condition): No data
Note: No data
Reference: Website https://www.microtronic.com/defect-library/wafer-contamination-small/, Image and text by courtesy of Microtronic company, 2020.

Figure 1: EAGLEview detects small contamination defects on the semiconductor wafer instantly. Typically, any small semiconductor wafer defect that is not a scratch or particle might be considered a small contamination macro defect. The image above shows a small contamination semiconductor wafer macro defect magnified 4x.

Figure 2: Example of a small contamination semiconductor wafer macro defect. Image magnified 8x.

Figure 3: An additional example of a semiconductor wafer macro defect caused by small contamination. Image magnified 4x.

Figure 4: An additional example of a semiconductor wafer macro defect picked up by EAGLEview caused by small contamination in the production process. Image magnified 8x.