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2 Chamber Macro Defect

Material Name: Wafer
Record No.: 91
Primary Chemical Element in Material: No data
Sample Type: Wafer
Uses: Etching
Etchant Name: None
Etching Method: Etching
Etchant (Electrolyte) Composition: No data
Procedure (Condition): No data
Note: No data
Reference: Website https://www.microtronic.com/defect-library/2-chamber-macro-defect/, Image and text by courtesy of Microtronic company, 2020.


Figure 1: Note that every other INCOMING semiconductor wafer is flagged which indicates there is a 2-Chamber issue or true macro defect. EAGLEview pinpoints processes that need corrective action by identifying the root cause of the macro defect.


Figure 2: Image taken by EAGLEview of a semiconductor wafer with a 2-chamber macro defect.