Interface Ltd.
4 Bardin Str.
Moscow 119334
Russia
Phone: +7 (095) 105-0049
Fax: +7 (095) 105-0049
Email
Website
NanoMaker is the e-beam lithography software/hardware system that is intended for microelectronics and nanotechnology industries and research centers for designing and manufacturing modern micro and nanoelectronic devices. Proximity effect correction is incorporated.