Nanometers Pattern Generation System (NPGS)
Joe Nabity, Ph.D.
JC Nabity Lithography Systems
P.O. Box 5354
Bozeman, MT 59717
USA
Tel: (406) 587-0848
Fax: (406) 586-9514
Email
Website
Nanometer Pattern Generation System for E-Beam Lithography
using a commercial Electron Microscope.