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Silicon - Chemical etching

Material Name: Silicon
Recipe No.: 10998
Primary Chemical Element in Material: Si
Sample Type: Bulk
Uses: General microstructure
Etchant Name: None
Type (Macro/Micro): Micro
Etching Method: Chemical
Etchant (Electrolyte) Composition: 90 ml distilled water, 15 ml HCl, 10 ml HF.
Procedure (Condition): No data
Note: For Si, to reveal SiO2.
Reference: Vander Voort, Metallography Principles and Practice, McGraw-Hill, Inc., 1984, p. 684.