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CP4 etchant - Silicon - Chemical polishing

Material Name: Silicon
Recipe No.: 9852
Primary Chemical Element in Material: Si
Sample Type: Bulk
Uses: Polishing
Etchant Name: CP4 etchant
Type (Macro/Micro): Micro
Etching Method: Chemical polishing
Etchant (Electrolyte) Composition: 20 ml HNO3, 5 ml HF.
Procedure (Condition): Use at 20 C dor 5-10 s.
Note: CP4 etchant
Reference: Vander Voort, Metallography Principles and Practice, McGraw-Hill, Inc., 1984, p. 559.